EBAC interconnection defect visualization system for semiconductor devices

The Hitachi NE4000 nanoEBAC gives excellent EBAC images using Hitachi?s patented EBAC amplifiers. Users can operate the easy to use GUI?Graphical User Interface?with various color and image processing functions. The NE400 is constructed with four high-precision nano-probe units. These probe units are coarse positioned using an integrated in-chamber CCD camera. The probing system utilizes a field tested, low chromatic aberration, Cold Field Emission (CFE) electron gun, that minimizes beam damage to the circuit and allows for low accelerating voltage imaging. This compact system for electrical characteristics evaluation can be used not only for semiconductors, but also for electric components and crystal materials.