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Linear Stage / XY / Z-axis / XYZ

linear stage / XY / Z-axis / XYZ

P-620.1 – P-629.1

Vnation JSC

linear stage / XY / Z-axis / XYZ
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  • Orientation:

    linear, XY, Z-axis, XYZ

  • Type:

    piezo

  • Number of axes:

    2-axis

  • Stroke :

    Min.: 50 ?m

    Max.: 1800 ?m

Resolution to 0.1 nm
Positioniergenauigkeit 0.02 %
Direct metrology with capacitive sensors
X, XY, Z, XYZ versions

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View catalogue Go to the Physik Instrumente website for more information
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