linear positioning stage / single-axis / precision / roller

The Ultra Precision Stage UPS-150 was specifically designed for sub- surface wafer inspection, fiber alignment,
high precision robotics and for all tasks where a maximum of positioning accuracy and reliability is absolutely
mandatory.
All ultra precision stages UPS-150 are equipped with a linear scale which is centrally installed between the
guides. Two limit switches protect against accidental over- travel. Due to high- quality cross- roller bearings a
maximum of load capacity and smooth motion is guaranteed. Special, stress- relieved, tempered aluminum- alloy
guarantees a homogeneous non- warping stage structure. The structural series 150 is driven by iron- less linear
motors and provides high acceleration and high travel speed. System accuracy below 1?m/100mm travel and a
bi- directional repeatability of less than 0.025 ?m is guaranteed. The ultra precision stages are supplied with
certificate of performance (flatness, straightness, pitch, yaw & position). The measurement is made with the stage
mounted and unloaded on granite with a flatness <1?m.