XY stage / piezoelectric / 2-axis
XY200M
Vnation JSC

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Orientation:
XY
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Type:
piezoelectric
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Number of axes:
2-axis
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Stroke :
Min.: 0 mm
Max.: 200 mm
The piezoelectric stage XY200M was designed around the APA 200M actuators and offers exceptional rigidity for applications like mask positioning, atomic force or scanning tunneling microscopes. It features maximum no-load displacement up to 200 ?m, 2.0 nm resolution and unloaded resonance frequency of 580 Hz. This standard unit has dimensions of 22x100x100 mm and is available with strain gauges, eddy current sensors and vacuum.
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