linear positioning stage / motorized / 2-axis / vacuum-compatible
SRS-008-04-020-01V
Vnation JSC

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Orientation:
linear
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Type:
motorized
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Number of axes:
2-axis
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Other characteristics:
vacuum-compatible
The first design decision for a vacuum motion system is the material of the bearings and structure. Vacuum motion systems are typically made from bare 6061 aluminum and 300 or 400 series Stainless Steel. Machined Aluminum without grinding or polishing so that it does have rolled pockets to trap air or contamination, works well and is the most cost effective material. Depending on the vacuum level even anodized stages can be used in low vacuum applications. (10-3 TORR) Since most precision bearings in vacuum are made from 400 Stainless Steel the use of 300 or 400 SS for the motion system is recommended when thermal variation are part of the application or experiment. This allows for the bearings and structure to deviate at the same rate allowing the bearings to maintain preload.
Other common materials used for motion platforms in vacuum are steel, copper, nickel, titanium and ceramic. All of these material works well with vacuum but some of their thermal coefficients of expansion can make for creative bearing adjustments which may reduce precision.