gas analyzer / monitoring / compact / process

NEW Transpector? CPM Compact Process Monitor



FAST, FIELD-READY PROCESS MONITORING SYSTEM



Performance, Reliability, and Versatility



INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.




Transpector CPM provides proven return on investment to our partners through:

Industry Leading Measurement Technology
Robust and Adaptive Architecture
Ease of Maintenance
Superior Product Support