INFICON Transpector? CPM provides in situ early warnings and lowers costs by:
measuring gas phase reactions verifying vacuum integrity identifying trace-level contaminants measuring process and background composition qualifying gas purity
The INFICON CPM Compact Process Monitor is a full-featured, compact and affordable gas analyzer that's ideally suited for in situ monitoring of complex processes. This dry-pumped system uses the proven technology of the INFICON Transpector 2 Gas Analysis System to help achieve new levels of performance.
gas analyzer / compact / in-situ