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DMD Deposition Machine

DMD deposition machine

Triple EFM

Vnation JSC

DMD deposition machine
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Aluminium (Al) Sputtering with excellent step coverage using the PlasmaPro System400

Al has applications in metal interconnects and hardmask. It may be deposited using Physical Vapour Deposition (PVD), also known as Sputter Deposition. Some process benefits include; wide temperature range, smooth surface and excellent step coverage.

Để lại bình luận

Go to the Oxford Instruments Plasma Technology website for more information
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