thermal evaporator / process
BAK 901
Vnation JSC

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Type:
thermal
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Laboratory/process:
process
With all the same capability as its big brother?s but a footprint of only 2m?, the BAK501 is the perfect choice where cleanroom space is at a premium, or coating areas are small.
BAK501 in a nutshell
Low materials utilization
Perfect for R&D or production on small substrate sizes
All the capabilities of bigger BAK platforms
Custom build versions on request including UHV variants
Platform overview
Available in standard, extended throw and split chamber versions, the BAK501 is the perfect base for customization as a R&D platform before scaling up to large substrate sizes and throughputs. Equip the system today with thermal, e gun or ion sources and rebuild it tomorrow with any of the other sources from the BAK source portfolio. Ask about Evatec engineering support including custom tooling to configure a BAK 501 platform thats just right for you or download our complete BAK platform overview brochure below.