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Rapid Thermal Processing Furnace / Chamber

rapid thermal processing furnace / chamber

JetFirst Bench Top RTP System 100/200-mm

Vnation JSC

rapid thermal processing furnace / chamber
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  • Function:

    rapid thermal processing

  • Configuration:

    chamber

Versatile and cost-effective software-controlled bench top-type rapid thermal processing (RTP) tool specifically designed to meet the requirements of R&D laboratories and small-scale production Units.

Processing capabilities:
*Rapid thermal annealing / RTA
*Implant monitoring
*Rapid thermal oxidation / RTO
*Rapid thermal nitridation / RTN
*Rapid thermal diffusion / RTD - e.g. Spin-on Dopant
*Crystallization, carbonization
*Contact alloying
*Selenization (with optional hardware)

Để lại bình luận

Go to the ECM Technologies website for more information
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