1. Home
  2. Detection - Measurement
  3. Position, Speed and Acceleration Measurement
  4. Laser displacement sensors, laser distance sensors
  5. multi-axis positioning system / 6-axis / 3-axis / 1/2-axis
Multi-axis Positioning System / 6-axis / 3-axis / 1/2-axis

multi-axis positioning system / 6-axis / 3-axis / 1/2-axis

ZMI™ Series

Vnation JSC

multi-axis positioning system / 6-axis / 3-axis / 1/2-axis
Contact us for advice solutions and equipment provider
captcha contact product

  • Number of axes:

    multi-axis, 6-axis, 3-axis, 1/2-axis, YZ, 2/3-axis, 4-axis, 5-axis, single-axis, 2-axis, XY, XZ

  • Features:

    linear, laser, optical

  • Applications:

    industrial, for the semiconductor industry, for wafer inspection and metrology, vacuum

  • Other characteristics:

    displacement measuring interferometer

ZMI!" Series - Displacement Measuring Interferometers
ZMI!" components can be assembled in a wide variety of configurations. The example systems below show some typical configurations used by ZMI!" customers.

2-Axis System
2-Axis System (Vacuum)
3-Axis System
Flat Panel Application

Để lại bình luận

Go to the Zygo Corporation website for more information
Products relative
Absolute rotary encoders
multi-turn rotary encoder / absolute / blind-shaft / PROFIBUS

multi-turn rotary encoder / absolute / blind-shaft / PROFIBUS

ø 58 mm, 28 bit | Sendix series
- Solid shaft: maximum diameter 10 mm - Blind hollow shaft: maximum diameter 15 mm - Housing diameter 58 mm - Protection class up to IP67 - Total resolution up to 28 Bit - Maximum revolution speed 9000 turns/min - Temperature range -40...+80?C
multi-turn rotary encoder / absolute / blind-shaft / EtherCAT

multi-turn rotary encoder / absolute / blind-shaft / EtherCAT

ø 58 mm, 28 bit | Sendix series
- Solid shaft: maximum diameter 10 mm - Blind hollow shaft: maximum diameter 15 mm - Housing diameter 58 mm - Interface: EtherCAT, CAN over Ethernet - Protection class up to IP67 - Total resolution up to 28 Bit - Maximum revolution speed ...
multi-turn rotary encoder / absolute / blind-shaft / CANopen

multi-turn rotary encoder / absolute / blind-shaft / CANopen

ø 58 mm, 28 bit | Sendix series
- Solid shaft: maximum diameter 10 mm - Blind hollow shaft: maximum diameter 15 mm - Housing diameter 58 mm - Interfaces: CANopen? and CANopen-Lift - Protection class up to IP67 - Total resolution up to 28 Bit - Maximum revolution speed ...
multi-turn rotary encoder / absolute / hollow-shaft / with SSI interface

multi-turn rotary encoder / absolute / hollow-shaft / with SSI interface

ø 58 mm, 12 bit | Sendix series
The Sendix Absolut-Encoder has a diameter housing which measures 36 mm, 58 mm, has a highly-resistant die cast housing and protection class of IP67, and an output of CANopen, SSI, Profibus, EtherCAT, Profinet. Its specifications include ...
multi-turn rotary encoder / absolute / potentiometer / solid-shaft

multi-turn rotary encoder / absolute / potentiometer / solid-shaft

ø 40 - 60 mm, 90° ... 43 200° | WP
WayCon Positionsmesstechnik's WP and WP-M rotary transducer models are designed for analog rotation & angle measurement. The WP-M model has a housing diameter of 40mm, while the WP model's housing diameter is 60mm. The housing are made ...
absolute rotary encoder / solid-shaft / CANopen / IP67

absolute rotary encoder / solid-shaft / CANopen / IP67

CMV36 - CO
Housing diameter: 36 mm
safety rotary encoder / absolute / solid-shaft / EtherCAT

safety rotary encoder / absolute / solid-shaft / EtherCAT

CDV75M - ETC + FS
Housing diameter: 75 mm
rotary encoder without bearings / absolute / single-turn / hollow-shaft

rotary encoder without bearings / absolute / single-turn / hollow-shaft

CDF36S - SSI
Housing diameter: 36 mm
Incremental rotary encoders
incremental rotary encoder / optical / hollow-shaft / explosion-proof

incremental rotary encoder / optical / hollow-shaft / explosion-proof

5834FS2
Housing diameter: 58 mm
incremental rotary encoder / optical / solid-shaft / IECEx

incremental rotary encoder / optical / solid-shaft / IECEx

5814FS2
Housing diameter: 58 mm
incremental rotary encoder / optical / solid-shaft / explosion-proof

incremental rotary encoder / optical / solid-shaft / explosion-proof

Sendix SIL 5814FS2
Housing diameter: 58 mm
incremental rotary encoder / solid-shaft / hollow-shaft / high-speed

incremental rotary encoder / solid-shaft / hollow-shaft / high-speed

Sendix Base KI50
More flexibility ? more performance Sendix 5000 / 5020 incremental encoders Flexibility redefined. The successful Sendix 5000 / 5020 family has been technically optimized and completed with further ...
incremental rotary encoder / blind-shaft / solid-shaft / compact

incremental rotary encoder / blind-shaft / solid-shaft / compact

DBS36 series
DBS36 incremental encoder has various features which include a face mount flange with solid or enclosed shaft that has 3 mounting hole sequence and servo groove. It uses a universal cable outlet, and ...
incremental rotary encoder / hollow-shaft / robust / compact

incremental rotary encoder / hollow-shaft / robust / compact

DBS60 series
Housing diameter: 58 mm
incremental rotary encoder / hollow-shaft / IP65 / for motor feedback

incremental rotary encoder / hollow-shaft / IP65 / for motor feedback

VFS60 series
Housing diameter: 54 mm - 60 mm
incremental rotary encoder / mechanical / commutation / for motor feedback

incremental rotary encoder / mechanical / commutation / for motor feedback

CFS50 series
The output driver operates on EIA 422 standards with incremental and commutation signals in mind. It operates at up to 65,536 lines per revolution and can use 32 pole pairs at a time. The temperatures go from -20 to 115 ...
Linear encoders
incremental linear encoder / inductive / non-contact / exposed

incremental linear encoder / inductive / non-contact / exposed

ID4501L
Length: 200 mm
Linear encoder resolution: 1.25 mm
optical linear encoder / sealed / high-accuracy / compact

optical linear encoder / sealed / high-accuracy / compact

KD series
Length: 250 mm - 6500 mm
Linear encoder resolution: 0.01, 0.01, 0.1, 0 mm
absolute linear encoder / optical

absolute linear encoder / optical

RF256 (55 mm, +/-1 µm)
Linear encoder resolution: 0.1, 10, 1, 0.5, 5 ?m
absolute linear encoder / optical / for harsh environments

absolute linear encoder / optical / for harsh environments

RF251 (25 mm, +/-1 µm)
Linear encoder resolution: 0.5, 1, 0.1, 10, 5 ?m
incremental linear encoder / magnetic / with digital display

incremental linear encoder / magnetic / with digital display

S1nMAG
The S1nMAG, manufactured by ELBO?, is a magnetic incremental linear encoder with digital display. This device is powered by a battery and it measures 96 x 72 x 47 mm. It can show either mm or inch units ...
absolute linear encoder / optical / sealed

absolute linear encoder / optical / sealed

50 - 500 mm | GL5, GL1
This product is Designed to make possible installations on limited spaces on both Machine Tools (e.g. diametral axis on Lathes) and Measurement Instruments. Travels range from 50 up to 500 mm with resolution of 5 micron and 1 micron. ...
incremental linear encoder / optical / sealed / glass scale

incremental linear encoder / optical / sealed / glass scale

GS 212
? Available in RS422, 11?A and 1 Vp-p ? Rated to Protection class ? Resolution available upto 0.1?mm ? Ideal for CNC applications ? Backlash free operation ? Bearing construction ensures less friction during movement
incremental linear encoder / magnetic / non-contact / digital

incremental linear encoder / magnetic / non-contact / digital

EMA21
Linear encoder resolution: 0.1 ?m - 100 ?m
Partners