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2-axis Inclination Sensor / Digital / Capacitive / MEMS

2-axis inclination sensor / digital / capacitive / MEMS

SI

Vnation JSC

2-axis inclination sensor / digital / capacitive / MEMS
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  • Number of axes:

    2-axis

  • Output signal:

    digital

  • Technology:

    capacitive, MEMS

  • Inclination:

    Min.: -90 ?

    Max.: 90 ?

  • Resolution:

    0.004 ?, 0.0015 ?

The capacitive inclination sensors from First Sensor are based on single crystal silicon and utilize the latest micromachining technology. The devices achieve large signal-to-noise ratios and excellent stability over temperature which allows them to detect smallest changes in inclination. Due to high aspect ratio microstructures (HARMS) the sensors feature ultra-low cross axis sensitivities. Further, the patented highly flexible AIM (Air gap Insulated Microstructures) technology minimizes parasitic capacitances.

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View catalogue Go to the First Sensor AG website for more information
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